RLSA Technology Abbreviation - All Acronyms RLSA Technology abbreviations defined. What does RLSA stand for in Technology terms? Top RLSA abbreviation in Technology category: Radial Line Slot Antenna TEL Releases New 300mm Trias SPA | Notification | Tokyo ... The Trias SPA uses unique Slot Plane Antenna (SPA) plasma, based on the Radial Line Slot Antenna (RLSA) microwave plasma developed by Professor Tadahiro Ohmi at Tohoku University. It produces high-density plasmas at low electron temperatures to enable damage-free processes at temperatures no higher than 400C. Trials of RF plasma production using different antenna ...
Exploration COMSOL in Modeling RLSATM CVD Processes
Abstract: The plasma reactor with radial line slot antenna (RLSATM), a planar microwave (2.45 GHz) plasma source, is used in etch and deposition technology, typically in reactive rich gaseous environment, and for processes that are sensitive to plasma damage. Besides a strict uniformity control, the plasma chemistry is Radial Line Slot Antennas - Home - Springer Radial Line Slot Antennas Hiroyuki Arai* Yokohama National University, Yokohama, Kanagawa, Japan Abstract This chapter presents the development history of radial line slot antenna. The antennas are used for circular polarized high-gain antenna in microwave and millimeter wave bands. Linearly polarized arrays Impact of static magnetic fields on the radial line slot ...
Radial Line Slot Antennas - Springer
A slot antenna consists of a metal surface, usually a flat plate, with one or more holes or slots ... Slot antennas are often used at UHF and microwave frequencies instead of line antennas when greater control of the radiation pattern is required. ... Plasma antenna · Quad antenna · Reflective array antenna · Regenerative loop ... Radial Line Slot Antennas - Springer communication antenna, plasma etching, and high power use. ... Radial line; Slot antenna; Circular polarization; Linear polarization; Direct broadcast satellite; ... Characteristics of large-diameter plasma using a radial-line slot antenna Characteristics of the surface-wave plasma generated by a radial-line slot antenna (RLSA) have been studied by both direct plasma probe measurements and ... Design of a Concentric Array Radial Line Slot Antenna for High-Power ...
A New Improvement of Radial Line Slot Antenna
A new design of feed for radial line slot antenna (RLSA) is presented. For better impedance match to the waveguide the effect of the various feed parameters is analyzed and their design sensitivity is studied. This paper emphasizes the advantages of using feed with a funnel below the connector entry... TEL Release TriasTM SPA Plasma Processing System Capable… Based on the Radial Line Slot Antenna (RLSA) microwave plasma developed for semiconductor processes by Professor Tadahiro Ohmi at Tohoku University, the Trias SPA uses the unique Slot Plane Antenna (SPA) plasma generating technology established by TEL... Radial line slot antenna The Radial Line Slot Antenna (RLSA) is a planar antenna having attributes such as high eciency of about 70% and higher gain of about 33 dBi [1] compared with antennas in similar usage. It can be designed for circular [2, 3] or linear polarization [4]. An interest in using this antenna is growing... Dual circularly polarized radial line slot antenna g .. INTRODUCTION Nowadays, the radial line slot antenna (RLSA) represents one of the most interesting planar radiating structures for its low cost, high efficiency, and mass-producible features. In the field of microwave and millimeter-wave applications, RLSA is considered an attractive candidate...
Radial Line Slot Antennas | SpringerLink
Radial Line Slot Antennas Hiroyuki Arai* Yokohama National University, Yokohama, Kanagawa, Japan Abstract This chapter presents the development history of radial line slot antenna. The antennas are used for circular polarized high-gain antenna in microwave and … Radial Line Slot Antennas | Request PDF
Design optimized spiral slot antennas for applications such as wireless communication, sensing, positioning, and tracking using Comsol Multiphysics and the RF Module. Planar antenna and antenna array - Ricoh Company, Ltd. A tapered slot plane antenna apparatus for a millimeter wave radio communication system which provides a tapered pattern composed by utilizing a Fermi-Diac distribution function so as to consider an i US4792810A - Microwave antenna - Google Patents Other proposed antenna designs are a radial line slot array antenna, and a waveguide slot array antenna. These antennas tend to have reduced dielectric and radiation losses, as compared to the microstrip line feed array antenna. US6812895B2 - Reconfigurable electromagnetic plasma waveguide…